NO NEED for re-qualification:
- Proven unique original processes
- By the original inventor Hans Kruwinus
- Recipes compatible with existing systems
- SEZ 203 recipes usable with the same process results
- “Copy & paste” tool replacement or addition to existing fleet
- Process development and improvement programs available
- SIC substrate processing and handling ready
Single wafer wet etch system for 150-300mm wafers.
Components & Design:
Spare parts available on site
Latest components: no more part obsolescence issues
> 90% of components from Europe (primarily Austria)
Valves, fittings and pumps from Japan
Improved design: Stäubli handling robots!
Bernoulli handling with wafer alignment available as an option